| 摘要 |
PROBLEM TO BE SOLVED: To provide a component for a precision instrument, which can be obtained by using a casting without use of a forged product, and a method of manufacturing the same.SOLUTION: In a component for use in exposure equipment being a precision instrument, for example, a frame 12 of a mirror part 2 of a light source device, hot hydrostatic press treatment is applied to a casting material so that an inherent defect can be crimped; an area ratio of the inherent defect is set at 0.15% or less; and discharge of a contaminated component from the inherent defect is suppressed to a degree that does not adversely affect the exposure equipment being the precision instrument. |
