| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement apparatus which can acquire, with high accuracy, information indicating at least one of: a shape, size, unevenness distribution, and surface roughness of at least one portion of an object of a measurement target; and a position (coordinates) of a point on a surface of the measurement target.SOLUTION: A shape measurement apparatus includes: a diffracting optical component 25 which deflects a light beam L1 incident thereon; an imaging unit 18 which captures an image of a measurement region on which the light beam deflected by the diffracting optical component 25 is projected; and a shape information acquisition unit 12 which acquires shape information of a measurement object based on a result of capturing performed by the imaging unit. |
