| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor that suppresses the deformation of a movable part by particularly improving the configuration of the movable part.SOLUTION: A physical quantity sensor comprises: a movable part 2 capable of being displaced in a height direction; a z direction detection part for detecting the displacement of the movable part 2; and z direction detection parts 50, 51 provided inside the movable part 2. Both ends 22, 23 of the movable part 2 in a longitudinal direction (X1-X2) constitute the fulcrum of the moment acting on the movable part 2. The movable part 2 is provided with a beam part 24 connecting both the ends 22, 23 in the longitudinal direction. |
