摘要 |
The present invention relates to a doping process tube door for a solar cell wafer. A doping process tube for a solar cell wafer for doping heat processing a solar cell wafer penetrating the inner part has a door mutually combined with an opening part of the process tube by mounting a ceramic gasket on a part combined with the process tube, at the opening part of the process tube, wherein the door has a bracket to accommodate the ceramic gasket ata position corresponding to the opening part of the process tube in the opening part direction. |