发明名称 DOOR OF DOPING PROCESS TUBE FOR SOLAR CELL WAFER
摘要 The present invention relates to a doping process tube door for a solar cell wafer. A doping process tube for a solar cell wafer for doping heat processing a solar cell wafer penetrating the inner part has a door mutually combined with an opening part of the process tube by mounting a ceramic gasket on a part combined with the process tube, at the opening part of the process tube, wherein the door has a bracket to accommodate the ceramic gasket ata position corresponding to the opening part of the process tube in the opening part direction.
申请公布号 KR101412224(B1) 申请公布日期 2014.06.26
申请号 KR20120158241 申请日期 2012.12.31
申请人 P&TECH CO., LTD. 发明人 KANG, DONG KYU;CHOI, JUNG HUN
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
代理机构 代理人
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