UPPER ELECTRODE OF DRY ETCHING CHAMBER AND METHOD FOR MANUFACTURING THE SAME

摘要

Disclosed are an upper electrode of a dry etching chamber and a method for manufacturing the same. The upper electrode includes a planar body and at least one gas-in unit. The planar body includes at least one through-hole. The gas-in unit is mounted inside the through-hole and includes multiple gas-in holes. The upper electrode of a dry etching chamber and the method for manufacturing the same form the gas holes inside the gas-hole unit, thereby preventing the planar body from being damaged and increasing a service life of the upper electrode.