发明名称 SHEET STICKING DEVICE, AND SHEET STICKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet sticking device capable of sticking an adhesive sheet, applied with tension in a crossing direction, on an adherend without using any dedicated raw fabric.SOLUTION: A sheet sticking device 1 includes: first delivery means 2 for delivering a raw fabric having a belt-like peel sheet RL temporarily fitted on an adhesion surface AD of an adhesive sheet having the adhesion surface AD on its one surface; second delivery means 3 for delivering a support material SL1 capable of supporting the adhesive sheet A from the other surface side of the adhesive sheet AS; first pressing means 4 for pressing and sticking the support material SL1 on the other surface of the adhesive sheet AS; sheet peeling means for peeling the adhesive sheet AS from the peel sheet RL; second press means 6 for pressing and sticking the adhesive sheet AS supported on the support material SL1 on an adherend WF; width-directional tension applying means for applying tension to the support material SL1 pressed by the second press means 6 in a direction crossing the delivery direction of the adhesive sheet A; and support material peeling means 8 for peeling the support material SL1 from the adhesive sheet AS.
申请公布号 JP2014116422(A) 申请公布日期 2014.06.26
申请号 JP20120268678 申请日期 2012.12.07
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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