| 摘要 |
PROBLEM TO BE SOLVED: To configure a pressure sensor capable of cost reduction without requiring a complex layer structure or wire routing structure.SOLUTION: The pressure sensor includes a substrate 1 and a diaphragm 2 formed on an upper part of the substrate. A conductor film 3 is formed on an inner surface of the diaphragm 2. Two electrodes 4,5 are formed on a surface facing the diaphragm 2 of the substrate 1. Terminals 6,7 which are electrically conducted with the electrodes 4,5 are formed on a lower surface of the substrate 1. When the diaphragm 2 is displaced in accordance with a pressure to be detected, a distance between the conductor film 3 and the electrodes 4,5 is changed. The conductor film 3 formed on the diaphragm 2 influences a fringe current generated between the electrodes 4,5, and the extent of the influence varies according to the distance between the conductor film 3 and the electrodes 4,5. In other words, electrostatic capacitance between the electrodes 4, 5 is changed according to an external force F, so that the external force F is detected on the basis of the electrostatic capacitance. |
