发明名称 Wynn-Dyson imaging system with reduced thermal distortion
摘要 A Wynn-Dyson imaging system with reduced thermal distortion is disclosed, wherein the reticle and wafer prisms are made of glass material having a coefficient of thermal expansion of no greater than about 100 ppb/° C. The system also includes a first IR-blocking window disposed between the reticle and the reticle prism, and a second matching window disposed between the wafer and the wafer prism to maintain imaging symmetry. The IR-blocking window substantially blocks convective and radiative heat from reaching the reticle prism, thereby reducing the amount of thermally induced image distortion in the reticle image formed on the wafer.
申请公布号 US2014176923(A1) 申请公布日期 2014.06.26
申请号 US201213723260 申请日期 2012.12.21
申请人 Hawryluk Andrew M. 发明人 Hawryluk Andrew M.
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项 1. A Wynn-Dyson imaging system that operates with ultraviolet (UV) light, comprising along an optical axis: a mirror having a concave surface; an aperture stop located at the mirror that determines a numerical aperture of the system; a lens assembly with positive refracting power and having a front end and a back end, with the lens assembly being arranged adjacent the mirror and spaced apart therefrom with the front end facing the mirror; first and second prisms operably disposed on opposite sides of the optical axis and adjacent the back end of the lens assembly, the first and second prisms having respective first and second planar surfaces, wherein the first and second planar surfaces are arranged adjacent object and image planes, respectively; and at least one of: a) the first and second prisms each being made of a glass material having a coefficient of thermal expansion of no greater than about 100 ppb/° C.; andb) a first window operably disposed between the planar surface of the first prism and the object plane and that substantially transmits the UV light and that substantially blocks infrared (IR) radiation in a wavelength range from 2 microns to 20 microns, and a second window that is operably disposed between the planar surface of the second prism and the image plane and that substantially transmits the UV light, wherein the first and second windows are configured to maintain imaging symmetry.
地址 Los Altos CA US