PIEZOELECTRIC ACTUATOR, INKJET PRINT HEAD ASSEMBLY, AND METHOD OF MANUFACTURING THE PIEZOELECTRIC ACTUATOR AND THE INKJET PRINT HEAD ASSEMBLY

摘要

A piezoelectric actuator includes upper and lower electrodes providing driving voltages and a piezoelectric film formed between the upper and lower electrodes and providing a driving force to ink in a plurality of pressure chambers formed on an inkjet print head, respectively. The piezoelectric film may include a plurality of basin parts individually formed on respective tops of the plurality of pressure chambers and a large-area part connected to the plurality of basin parts, respectively, at one ends of the plurality of basin parts and formed as a single body. The large-area part may include an etching groove formed on an extended line of a basin line partitioning the basin parts.

主权项

1. A piezoelectric actuator comprising:
upper and lower electrodes providing driving voltages; and a piezoelectric film formed between the upper and lower electrodes and providing a driving force to ink in a plurality of pressure chambers formed on an inkjet print head, respectively, wherein the piezoelectric film comprises a plurality of basin parts individually formed on respective tops of the plurality of pressure chambers and a large-area part connected to the plurality of basin parts, respectively, at one ends of the plurality of basin parts and formed as a single body, and wherein the large-area part comprises an etching groove formed on an extended line of a basin line partitioning the basin parts.