| 摘要 |
The present invention relates to a substrate edge detection apparatus, comprising a camera part for photographing the edge of a substrate to which a film is attached; a scanner part which is installed between the substrate and the camera part, which adjusts spots and angles for photographing the substrate, and which reflects the image of the substrate to the camera part to allow the camera part to photograph the reflected image; a stage for supporting the substrate; and a control part for controlling the operation of the camera part, the scanner part, and the stage. |
