主权项 |
1. A multi-shaft linear motor comprising a plurality of single-shaft linear motors,
wherein: each of the plurality of single-shaft linear motors includes a base plate, a movable member disposed movably in a given moving direction with respect to a base surface of the base plate, a stator extending along the moving direction, the stator disposed on the base plate, and a mover extending along the moving direction, the mover attached to the movable member being distanced from the stator while facing to the stator with respect to a widthwise direction perpendicular to the moving direction; each of the plurality of single-shaft linear motors is configured to drive the moving member in the moving direction by interaction of a magnetic flux generated between the moving member and the stator; each of the plurality of single-shaft linear motors is stacked along a normal direction of the base surface; a standing wall extending along the normal direction is formed on each of both sides of the base plate with respect to the widthwise direction, the standing wall extends along the moving direction so that a containing space surrounded by the standing wall and the base surface defines an opening toward the normal direction, and the movable member, the stator, and the mover are accommodated in the containing space; and a top of the standing wall of a bottom-side single-shaft linear motor located on a bottom-side in a stacking direction is fixed on an opposing surface of a base plate of a top-side single-shaft linear motor adjacent to top-side of the bottom-side single-shaft linear motor, so that the containing space of the bottom-side single-shaft linear motor is covered by the opposing surface of the base plate of the top-side single-shaft linear motor. |