| 摘要 |
A vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing has a main body, in which a sleeve and a lower mounting plate, a piston cylinder and the sleeve are both lubricated and supported with air bearing surfaces respectively, and the angle degree of freedom between a upper mounting plate and the lower mounting plate is decoupled with a spherical air bearing; a position close-loop control system comprising voice coil motors, displacement sensors, limit switches, a controller and a driver is introduced, and the relative position between the upper mounting plate and the lower mounting plate is precisely controlled. |
