NANOCRYSTALLINE ZINC OXIDE FOR PHOTOVOLTAIC MODULES AND HYDROGEN TREATMENT METHOD

摘要

A method for fabricating a thin film solar device. One aspect includes providing a substrate having a base layer of transparent conductive oxide (TCO) deposited on a surface of the substrate, performing a surface treatment process on at least a portion of the base layer to provide a treated surface of the base layer, and depositing at least one fill layer on the treated surface of the base layer by growing a new TCO layer having a different crystallite path than the base layer. Another aspect includes hydrogen plasma treatment of a TCO layer.