RECIPE GENERATION APPARATUS, INSPECTION SUPPORT APPARATUS, INSPECTION SYSTEM, AND RECORDING MEDIA

摘要

A desired area is extracted by directly analyzing information recorded in a design layout, an inspection recipe is generated by using this extraction method, and an efficient inspection is realized. The invention makes it easy to extract an area of a desired circuit module such as a memory mat by analyzing hierarchy information of design layout data, calculating reference frequency of each one cell in the design layout data that is its internal data, sorting the cells in order of increasing reference frequency, searching the object, and tracing its upper cell.

主权项

1. A recipe generation apparatus that generates a recipe of an inspection apparatus for inspecting a pattern corresponding a plurality of cells using image data obtained by irradiating a light or charged particle beam onto a sample on which the pattern is formed, the recipe generation apparatus comprising:
a storage means for storing design layout data of the pattern; a processor for executing predetermined arithmetic processing on the design layout data; and a display for displaying a processed result by the processor, wherein the processor analyzes a reference relationship between the plurality of cells, and the display displays a reference frequency between the plurality of cells together with a layout of the pattern.