TFT ARRAY SUBSTRATE MANUFACTURING METHOD THEREOF AND DISPLAY DEVICE

摘要

According to embodiments of the invention, there are provided a TFT array substrate, a manufacturing method thereof and a liquid crystal display. The manufacturing method comprises manufacturing a pattern including a gate electrode, a gate insulating layer pattern with a via hole, a pattern including an active layer, a pattern including source and drain electrodes and a pattern including a first electrode on a substrate. The formation of the gate insulating layer pattern with the via hole and the pattern including the active layer are completed through one patterning process, the pattern including the gate electrode at least includes the gate electrode and a gate leading wire, the via hole of the gate insulating layer is located over the gate leading wire, and the active layer is located over the gate electrode.

主权项

1. A manufacturing method of a TFT array substrate, which comprises manufacturing a pattern including a gate electrode, a gate insulating layer pattern with a via hole, a pattern including an active layer, a pattern including source and drain electrodes and a pattern including a first electrode on a substrate, wherein,
through one patterning process, the gate insulating layer pattern with the via hole and the pattern including the active layer are formed, the pattern including the gate electrode at least includes the gate electrode and a gate leading wire, the via hole of the gate insulating layer is located over the gate leading wire, and the active layer is located over the gate electrode.