FLUORINE-CONTAINING ELASTOMER COMPOSITION AND RUBBER MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a fluorine-containing elastomer composition exhibiting satisfactory plasma resistance even upon plasma irradiation in a state where a high load is applied and capable of molding a rubber member in which the generation of cracks is satisfactorily suppressed.SOLUTION: Provided is a fluorine-containing elastomer composition comprising, to 100 pts.mass of a fluorine-containing elastomer capable of crosslinking peroxide, hydrophilic dry silica whose specific surface area measured by a BET method is 30 to 500 m/g by 3 to 50 pts.mass and organic peroxide by 0.5 to 3 pts.mass.