发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To improve productivity when manufacturing a pixel comprising a thin-film transistor using an oxide semiconductor.SOLUTION: A semiconductor device comprises: a first wiring functioning as a gate electrode formed on a substrate; a gate insulating film formed on the first wiring; a second wiring, on the gate insulating film, formed by stacking a low-resistance oxide semiconductor layer and a conductive layer on the low-resistance oxide semiconductor layer; an electrode layer formed by stacking the low-resistance oxide semiconductor layer and the conductive layer so that a region functioning as a pixel electrode of the low-resistance oxide semiconductor layer may be exposed; and a high-resistance oxide semiconductor layer formed between the second wiring on the gate insulating film and the electrode layer.</p>
申请公布号 JP2014116617(A) 申请公布日期 2014.06.26
申请号 JP20140003825 申请日期 2014.01.13
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 ARAI YASUYUKI
分类号 H01L29/786;G09F9/30;H01L21/28;H01L21/336;H01L21/768;H01L23/522;H01L29/417;H01L51/50;H05B33/14 主分类号 H01L29/786
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