| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor chip vacuum sintering furnace which can accurately grasp an internal temperature of a tray.SOLUTION: The capacitor chip vacuum sintering furnace comprises: a sintering chamber 1 having a sintering gate 10 at its bottom and performing the organic binder removal of a capacitor chip and high-temperature sintering; two sets of cooling chambers 2 which are arranged at the lower side of the sintering chamber 1, mounted on a rotating table, have cooling gates 10b at upper parts, and perform passivation cooling by an inactive gas; a tray unit 3 in which the capacitor ship is accommodated, and which has a notch at an attachment shaft arranged in the center, and is composed of a single or a plurality of trays with lids; a tray drive mechanism 4 for holding the tray unit 3 by a tray holding tube 21, and making the tray unit 3 ascend, rotate and descend; a single or a plurality of thermocouples 19 arranged in the tray holding tube 21 and measuring the internal temperature of the tray; and a temperature measurement hole 23 formed at the sidewall of the tray holding tube 21 and opened at the inside of the tray while communicating with the notch. |
