ABERRATION CORRECTING METHOD AND ABERRATION CORRECTING APPARATUS

摘要

Aberration is measured as phase information at each of a plurality of aberration measurement points, and at the time of correcting the aberration with correction pixels of an aberration correction unit of which the number is greater than the number of the plurality of aberration measurement points, correction pixels corresponding to each aberration measurement point are driven based on the phase information. Regarding correction pixels not positionally corresponding to the aberration measurement points, the aberration correction unit is driven based on phase information in the vicinity of this correction pixel.

主权项

1. An aberration correcting method comprising:
measuring, using an aberration measuring unit, an aberration of reflected light acquired by irradiating measurement light on a subject, the aberration being measured as phase information at each of a plurality of aberration measurement points; driving an aberration correction unit to correct pixel values corresponding to each aberration measurement point based on the phase information with correction pixels of which the number is greater than the number of the plurality of aberration measurement points; and driving, regarding correction pixels not positionally corresponding to each of the aberration measurement points, the aberration correction unit based on the phase information in the vicinity of the correction pixel.