| 主权项 |
1. A method for fabricating a magnetic transducer having an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS), the method comprising:
providing an etch stop layer; providing a nonmagnetic etchable layer on the etch stop layer; providing a side shield layer residing between the ABS location and the etch stop layer and between the ABS location and the etchable layer; removing a first portion of the side shield layer and first portion of the nonmagnetic etchable layer using a first removal process, thereby forming a first portion of a pole trench, the first portion of the pole trench having a bottom and a top wider than the bottom in the side shield layer; removing at least a second portion of the nonmagnetic etchable layer using a second removal process, thereby forming the pole trench, the pole trench having a pole trench bottom and a pole trench top wider than the pole trench bottom in the side shield layer and a substantially perpendicular sidewalls in the nonmagnetic etchable layer; providing a nonmagnetic side gap layer, at least a portion of the nonmagnetic side gap layer residing in the pole trench, a remaining portion of the pole trench having a location and profile for a pole; forming the pole, at least a portion of the pole residing in the remaining portion of the pole trench; providing a write gap, at least a portion of the write gap being on the pole; and providing a trailing shield, at least a portion of the trailing shield being on the write gap. |
