发明名称 RESIST REMOVAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a resist removal device having such characteristics that: first, removing property for a resist is significantly improved and a resist is reliably stripped and removed without leaving a residue; and secondarily, these performances can be simply and easily achieved with superiority from viewpoints of space and cost.SOLUTION: A resist removal device 10 is used in a process of manufacturing an electronic circuit board, that is, the device is used as a developing machine in a developing process or a peeling machine in a peeling process of the manufacturing process. The device strips and removes a predetermined resist from an outer surface of a board material (A). The device includes: an immersion tank 11 filled with a treatment liquid (B) such as a developing solution or a release solution; a conveyer 12 for conveying the board material (A) in a solution (E) in the immersion tank 11; and an ultrasonic transducer 13 disposed in the immersion tank 11. The ultrasonic transducer 13 is disposed in the solution (E) to oppose to the conveyed board material (A); and the predetermined resist is stripped and removed from the outer surface of the board material (A) by emission and transmission of ultrasonic waves.
申请公布号 JP2014115307(A) 申请公布日期 2014.06.26
申请号 JP20120266843 申请日期 2012.12.06
申请人 TOKYO KAKOKI KK 发明人 NOZAWA TOSHIHIKO;SHIM KYU HYUN
分类号 G03F7/42;H01L21/027 主分类号 G03F7/42
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