Method of manufacturing mirror shells of a nested shells grazing incidence mirror

摘要

The present invention relates to a method of manufacturing mirror shells (11) of a nested shells grazing incidence mirror, in particular for EUV radiation and/or X-rays. In the method a blank (1) of a bulk material is provided and machined to form a mirror body (2) of the shell (11). Mechanical structures (3, 4) are integrated and/or attached to the mirror body (2) during and/or after the machining step. The mechanical structures (3, 4) are required for mounting and/or operating the mirror shells (11). After these steps the optical surface (7) is formed on the mirror body (2) by diamond turning. The proposed method allows the manufacturing of mirror shells of a nested shells grazing incidence mirror at low costs with high optical quality which may also be refurbished one or several times.