Method of calibrating surface texture measurement device

摘要

A method of calibrating a surface texture measurement device includes obtaining Y-axis shape measurement data and a maximum diameter portion to obtain upper and lower maximum diameter portions of a reference sphere 100 from Y-axis upper and lower shape data obtained by relatively moving in the Y-axis direction while a downward and an upward styluses 26B, 26A are in contact with an upper and a lower surfaces, respectively, of the reference sphere 100; obtaining X-axis shape measurement data to obtain X-axis upper and lower shape data of the reference sphere 100 by relatively moving in the X-axis direction while the downward stylus 26B is in contact with the upper diameter portion and the upward stylus 26A with the lower diameter portion of the reference sphere 100; and calculating offset amounts ”x and ”z of the upward and downward styluses from center coordinates 03 and 04 obtained from the shape data.