SYSTEMS AND METHODS FOR AN INTEGRATED BIO-ENTITY MANIPULATION AND PROCESSING SEMICONDUCTOR DEVICE

摘要

Disclosed is an integrated semiconductor device for manipulating and processing a bio-entity sample. The device comprises: a fine fluid channel connected to a fluid control circuit; an optical sensor array connected to a sensor control circuit; an optical component arranged according to the optical sensor array to manipulate optical signals before the optical signals arrive at the optical sensor array; and a fine fluid grid connected to the fine fluid channel for providing a movement of a bio-entity sample droplet by electro-wetting. The device further includes a logic circuit which is combined with the fluid control circuit and the sensor control circuit. The fluid sensor circuit, sensor control circuit and logic circuit are formed on a first substrate.