发明名称 |
PLASMA PROCESSING APPARATUS |
摘要 |
<p>The present invention relates to an apparatus (10) for plasma processing an article (12), the apparatus comprising: a chamber (14) for receiving an article to be processed; electrode means (16) for generating an electric field in said chamber for establishing a plasma in said chamber so that said article can be processed; generation means (24) for generating alternating electrical energy for transmission to said electrode means (18); connection means for connecting said generation means to said electrode means (20); and control means for varying the location of nodes and anti-nodes of standing waves generated in said chamber during processing, so that a plurality of standing waves are generated over time which are not coincident with one another.</p> |
申请公布号 |
EP2745307(A1) |
申请公布日期 |
2014.06.25 |
申请号 |
EP20110763753 |
申请日期 |
2011.08.16 |
申请人 |
P2I LTD |
发明人 |
COULSON, STEPHEN RICHARD;HOPPER, FRED;KING, CHARLES EDMUND |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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