| 摘要 |
PROBLEM TO BE SOLVED: To provide a generation apparatus capable of efficiently cooling electrode bars with air, discharging sufficient quantity of electric charges, even if a voltage applied to the electrode bars drops, and properly changing the discharge faces of the electrode bars. SOLUTION: The plasma generating apparatus 1 applies a voltage across a first electrode bar 11 and a second electrode bar 12 to cause discharge for plasma generation. The first electrode bar 11 and second electrode bar 12 are made of a high-density complex having high heat conductivity and are so arranged that the outer peripheral surfaces of both electrode bars face each other. A first support member 13 and a second support member 14 are made of a high-density complex having high heat conductivity, and are moved around the axis of a reactor container 15 so that the both support members are held at given positions relative to the reactor container 15. COPYRIGHT: (C)2011,JPO&INPIT |
