发明名称
摘要 Method for producing an MST device, and MST device A method for producing an electromechanical transducer is described, wherein an MST component is arranged in a container, and the container is closed with a cover layer, wherein the cover layer is provided with at least one cutout which divides the cover layer into an inner region and an outer region in such a way that both the inner region and the outer region are connected to the top side—facing the cover layer—of the MST component, and the inner region is lifted off while the outer region remains adhered.
申请公布号 JP5530432(B2) 申请公布日期 2014.06.25
申请号 JP20110517119 申请日期 2009.07.06
申请人 发明人
分类号 B81C3/00;B81B7/02 主分类号 B81C3/00
代理机构 代理人
主权项
地址
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