| 摘要 |
The ionization pumping stage (10) comprises an inlet (12) for the gas entering in the pump stage, where an ionization section (14) stands in connection with the inlet in a gas-conducting manner. An ionization unit is provided for the ionization of the gas entered in the ionization section. An acceleration unit (20) is formed for accelerating the ionized gas in the conveying direction of the gas. The gas molecules (32,32') to be conveyed are selected from the group which has hydrogen, oxygen, nitrogen, carbon monoxide and carbon dioxide-molecules. An independent claim is included for a vacuum pump with a turbo molecular pumping stage. |
