发明名称
摘要 PROBLEM TO BE SOLVED: To enable dressing board cutting with a cutting blade in which dressing board holding means is capable of holding a dressing board appropriately without occurence of warping of the dressing board in a direction of a cut surface. SOLUTION: A dressing board holding table suckingly holding a dressing board 7, which is cut by a one-way cutting blade for dressing thereof, comprises: a suction part 41 sucking the dressing board 7; and a warp pressing part 42 including a first pressing part 43 and a second pressing part 44 to press both ends of the dressing board 7 in a direction perpendicular to the cutting direction. This configuration enables the dressing board holding table 4 to hold the dressing board 7 without occurence of warping in a direction of a cut surface 70 even when a cutting groove is formed in the dressing board 7 in a cutting direction by the cutting blade, whereby dressing can be appropriately continued. COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5530815(B2) 申请公布日期 2014.06.25
申请号 JP20100130880 申请日期 2010.06.08
申请人 发明人
分类号 H01L21/301;B24B53/00 主分类号 H01L21/301
代理机构 代理人
主权项
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