| 摘要 |
PROBLEM TO BE SOLVED: To provide a supporting tray in which a plurality of workpieces are machined all at once without damaging outer circumferences of the workpieces. SOLUTION: The supporting tray is provided for supporting the workpieces. The tray includes a plurality of circular concave portions formed at the upper surface of a supporting substrate and separated from one another. COPYRIGHT: (C)2012,JPO&INPIT |
