METHOD FOR PRODUCING A CERAMIC SUBSTRATE IN Si3N4

摘要

Provided are a process for producing a highly reliable ceramic sheet with stable quality by reducing voids, and a ceramic substrate using the sheet. A highly reliable ceramic sheet with stable quality is obtained by using hydroxypropylmethyl cellulose as an organic binder, kneading a powder material, preferably, with a twin screw extruder, and then forming a sheet by means of a single screw extruder equipped with a sheet die, and the sheet is suitably used for a ceramic substrate and a ceramic circuit board.