| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum adsorption apparatus that can enhance the processing precision of a substrate with securing a space for an air intake groove. SOLUTION: A vacuum adsorption apparatus has a support portion formed of a ceramic dense sintered body having an air intake groove formed in a recess portion, and a porous mount portion for a porous body formed of ceramic powder and binding material. The ceramic powder is bound by the binding material to achieve the porous body, and the porous body and the support portion are joined to each other by the porous binding material to form the porous mount portion in the recess portion. The mount portion and a part of at least the side wall surface of the recess portion and the air intake groove are joined to each other through no gap therebetween. COPYRIGHT: (C)2012,JPO&INPIT |
