| 发明名称 |
SUBSTRATE SUPPORTING PLATE AND APPARATUS FOR DEPOSITING THIN FILM HAVING THE SAME |
| 摘要 |
The present invention relates to a substrate supporting plate for supporting a substrate inside a chamber comprising: a plate; a supporting member on the top of the plate to separate the substrate from the plate; and a concave groove on the top of the plate and a device for depositing a thin film having the same. The supporting member is separately manufactured from the plate to be partially joined to the groove. |
| 申请公布号 |
KR101411385(B1) |
申请公布日期 |
2014.06.25 |
| 申请号 |
KR20130157284 |
申请日期 |
2013.12.17 |
| 申请人 |
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发明人 |
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| 分类号 |
C23C16/458;H01L21/205;H01L21/683 |
主分类号 |
C23C16/458 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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