Method for fabricating an absorbing layer of a solar cell and a thermal treatment apparatus thereof

摘要

A method for fabricating an absorbing layer of a solar cell and a thermal treatment device (10 ` 50) thereof adapted for forming an absorbing layer on a substrate (20) are disclosed. The method the following steps. First, a solid-phase vapor source (120 ` 510) in a chamber (11 ` 551) and an absorbing layer precursor (30) on a substrate (20) are maintained by a predetermined distance (D) (S103). The solid-phase vapor source (120 ` 510) contains tin. The absorbing layer precursor (30) contains copper, zinc, tin and sulfur. The temperature inside the chamber (11 ` 51) is raised to a forming temperature, so that the absorbing layer precursor (30) forms an absorbing layer on the substrate (20) (S104).