Templates for the lateral overgrowth at least one group III nitride based layer

摘要

Template (10) for lateral overgrowth of at least one group-III nitride-based layer along a first direction, which is structured at least in a partial region by recesses (20) extending in the first direction and are separated by approximately parallel webs (30), is claimed. Epitaxy is a method for the lateral growth of a group iii-nitride layer on structured templates. The webs mainly extend in the first direction and are arranged one behind the other in a second direction perpendicular to the first direction. The structured portion of connecting webs (41) connects the parallel webs with each other.