| 摘要 |
The present invention relates to a production method of nitrogen trifluoride gas capable of reducing production costs which comprises the following steps: electrolyzing molten salt electrolyte formed of ammonia (NH3) and hydrogen fluoride (HF) in an electrolyzing tank including positive and negative electrodes to obtain nitrogen trifluoride; and refining the nitrogen trifluoride using a coolant. In the production method of nitrogen trifluoride, the hydrogen fluoride (HF) from positive reaction gas and negative reaction gas generated from positive and negative electrodes are collected, and reused as a material for the salt electrolyte. |
