| 摘要 |
<p>The present invention relates to a transfer apparatus for loading a wafer into arrangement for cleaning a wafer and, more specifically, to a transfer apparatus capable of selectively loading one of wafers arranged in a cassette. According to an embodiment of the present invention, the transfer apparatus for cleaning a wafer includes a plurality of gripping units capable of gripping the sides of wafers; a grip rotation unit prepared on top of the gripping units to provide pressurizing force to the gripping units; and a rotation shaft penetrating the gripping units.</p> |
