| 摘要 |
Provided are a transport arm, a transport apparatus, and a transport method to stably transport a heated or bent substrate, a substrate that is heated and curved in particular, from one process to another process by holding the substrate, and to stably detach the held substrate. A transport arm (1) including a holding unit (2) that holds a substrate by vacuum adsorption. The holding unit (2) has an air discharge port (3) and an adsorption member (4) formed so as to surround the air discharge port (3). The adsorption member (4) is a squeeze packing. |
