| 发明名称 | Electromechanical transducer and method of producing the same | ||
| 摘要 | An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less. | ||
| 申请公布号 | US8760035(B2) | 申请公布日期 | 2014.06.24 |
| 申请号 | US201213436336 | 申请日期 | 2012.03.30 |
| 申请人 | Canon Kabushiki Kaisha | 发明人 | Tomiyoshi Toshio;Torashima Kazutoshi;Akiyama Takahiro |
| 分类号 | H01L41/047 | 主分类号 | H01L41/047 |
| 代理机构 | Canon USA, Inc. IP Division | 代理人 | Canon USA, Inc. IP Division |
| 主权项 | 1. An electromechanical transducer comprising: a substrate; a first electrode disposed on the substrate; and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode, wherein the first electrode has a surface roughness value of 6 nm RMS (root-mean-square) or less. | ||
| 地址 | Tokyo JP | ||