Corrugated membrane MEMS actuator

摘要

A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A heater is associated with the second liquid chamber. A flexible corrugated membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber from each other.

主权项

1. A liquid dispenser comprising:
a first liquid chamber including a nozzle, the nozzle including a center point; a second liquid chamber; a split heater associated with the second liquid chamber, the split heater including a center point and two halves symmetrically positioned relative to the center point; a flexible corrugated membrane positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber, wherein the center points of the nozzle and the split heater are collinear relative to each other.