Method and apparatus for measuring spacings between optical surfaces of an optical system

摘要

A method for measuring spacings between optical surfaces of a multi-lens optical system includes detecting the centring state of the optical system by taking into consideration all optical surfaces of the optical system. Then the optical system is adjusted in such a way, taking the centring state into consideration, that the optical axis of the optical system is aligned as far as possible with a reference axis. In a next step the spacings between the optical surfaces are determined with the aid of a short-coherence interferometer. The measuring-light ray directed onto the optical system for this purpose runs likewise along the reference axis.

主权项

1. A method for measuring spacings between optical surfaces of an optical system, comprising the following steps:
a) detecting a centring state of the optical system by
directing a test-light ray, which propagates along a reference axis, onto the optical system, anddetecting a location, at which the test-light ray impinges onto a location-resolving optical sensor, after it has passed completely through the optical system,so that all optical surfaces inside the optical system are taken into consideration; b) adjusting the optical system, taking into consideration the centring state detected in step a); c) transilluminating the optical system with a measuring-light ray which propagates along the reference axis; d) superimposing portions of the measuring-light ray that were reflected from the optical surfaces with a reference-light ray in an interferometer; e) determining the spacings between the optical surfaces along the reference axis by detecting and evaluating interference phenomena between the reflected portions and the reference-light ray.