Current steering element and non-volatile memory element incorporating current steering element

摘要

A current steering element (100) formed such that the current steering element covers a lower opening (105) of a via hole (104) formed in an interlayer insulating layer (102), comprises: a corrosion-suppressing layer (106) formed on a lower side of a lower opening of the via hole such that the corrosion-suppressing layer covers an entire portion of the lower opening; a second electrode layer (108) formed under the corrosion-suppressing layer and comprising a material different from a material of the corrosion-suppressing layer; a current steering layer (110) formed under the second electrode layer such that the current steering layer is physically in contact with the second electrode layer; and a first electrode layer (112) formed under the current steering layer such that the first electrode layer is physically in contact with the current steering layer; and the first electrode layer, the current steering layer and the second electrode layer constitute one of a MSM diode and a MIM diode.

主权项

1. A method of manufacturing a current steering element comprising the steps of:
forming a lower wire; forming a first electrode layer such that the first electrode layer is electrically connected to the lower wire; forming a current steering layer on the first electrode layer such that the current steering layer physically contacts the first electrode layer; forming a second electrode layer on the current steering layer such that the second electrode layer physically contacts the current steering layer; forming a corrosion-suppressing layer on the second electrode layer using a material having a higher standard electrode potential than a material of the second electrode layer; forming an interlayer insulating layer such that the interlayer insulating layer covers the corrosion-suppressing layer, the second electrode layer, the current steering layer and the first electrode layer; forming a via hole in the interlayer insulating layer such that an entire portion of the lower opening of the via hole opens on the corrosion-suppressing layer; and washing an interior of the via hole using a washing liquid containing water.