| 摘要 |
The present invention relates to a vacuum forming device having an air bearing type turbo vacuum pump comprising a turbo vacuum pump having an air bearing for supporting the rotation of an impeller; and a moisture separating device, which is installed in a location through which gas inhaled by a vacuum pump is passing before reaching the impeller, to remove moisture contained in the gas. According to the present invention, the vacuum forming device is capable of removing moisture and an adhesive material (a material can be attached to the impeller) contained in moisture while the inhaled gas is passing through a moisture removing device before reaching the impeller equipped in the air bearing type turbo vacuum pump, so the turbo vacuum pump is smoothly driven without failures when driving the turbo vacuum pump. Moreover, moisture and an adhesive material contained in moisture can be separated in an economical way when the moisture is separated by being condensed in a partition while the inhaled gas moves through a space divided by the partition by having the moisture separating device. |
