WAFER TRANSPORTING APPARATUS

摘要

According to an aspect of the present invention, provided is a wafer transportation device comprising a support part for supporting wafers; a body part to which the support part is coupled to be movable relatively; and an impact sensor part for detecting the relative movement of the support part from the body part. According to an embodiment of the present invention, the wafer transportation device can reduce time required for a process and can minimize damage to products by quickly detecting errors caused in a wafer transportation process.