MAGNETIC LEVITATION TRANSFER APPARATUS

摘要

A magnetic levitation transfer apparatus is to transfer a moving body along a transfer path inside a chamber. The magnetic levitation transfer apparatus comprises: a levitation magnetic body including a first levitation magnetic body which is placed below a moving body along a transfer path, and a second levitation magnetic body which is placed at the back surface of the moving body facing the first levitation magnetic body so that the moving body can magnetically levitate in the transfer path by magnetically functioning with the first levitation magnetic body; a transfer propulsion unit including a transfer magnetic body which is placed at one end of the moving body in order to apply transfer propulsion force to the moving body that is magnetically levitated by the levitation magnetic body, and a transfer coil which is placed at a side wall of the chamber for mutually functioning with the transfer magnetic body in order to face the transfer magnetic body; and a guide magnetic body including first guide magnetic bodies which are placed at both ends of the moving body so that the moving body can be transferred along the transfer path by being generated by the levitation magnetic body and the transfer propulsion unit in order to offset a force impeding the transfer of the moving body, and second guide magnetic bodies which are placed on both side walls of the chamber in order to face the first guide magnetic bodies.