发明名称 METHOD FOR MOLECULAR BONDING OF SILICON AND GLASS SUBSTRATES
摘要 The method involves holding a substrate (1a) e.g. glass sheet, by two support points (S1, S2), and positioning substrate and another substrate (1b) e.g. silicon tile, so that surfaces (2a, 2b) of the substrates are provided opposite to each other. The former substrate is deformed by applying a strain (F) between a pressure point (P1) and the two support points, where the strain is directed toward the other substrate. The deformed surface and latter surface are in contact with each other, and the strain is progressively released.
申请公布号 KR101410858(B1) 申请公布日期 2014.06.24
申请号 KR20110095212 申请日期 2011.09.21
申请人 发明人
分类号 H01L21/20;H01L27/12 主分类号 H01L21/20
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