Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable body

摘要

An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an outgoing surface of the projection optical system, and a blade that comes into proximity within a predetermined distance of the fine movement stage when the fine movement stage is holding the liquid with the projection optical system, and moves along with the fine movement stage while maintaining the proximity state, and then holds the liquid with the projection optical system after the movement. Accordingly, a plurality of stages will not have to be placed right under the projection optical system interchangeably, which can suppress an increase in footprint of the exposure apparatus.

主权项

1. An exposure apparatus that exposes an object with an energy beam via a liquid, the apparatus comprising:
a first movable body which is movable at least along a two-dimensional plane; an optical member which has an outgoing plane that emits the energy beam; a holding member which is movably supported by the first movable body, holds the object and is movable at least within a plane parallel to the two-dimensional plane facing the outgoing plane, and also can hold the liquid with the optical member when located at a position facing the outgoing plane; a position measurement system which has a measurement member, extending in a first axis direction parallel to the two-dimensional plane, where at least a part of a head is provided that irradiates at least one measurement beam from below on a measurement plane placed on a surface substantially parallel to the two-dimensional plane of the holding member and receives a light of the measurement beam from the measurement plane, and which measures positional information of the holding member within the two-dimensional plane, based on an output of the head; and a movable member which becomes proximal to the holding member within a predetermined distance in the first axis direction parallel to the two-dimensional plane when the holding member holds the liquid with the optical member, and moves from one side of the first axis direction to the other side along the measurement member with the holding member while maintaining the proximal state, and holds the liquid with the optical member after the movement.