| 摘要 |
The present invention relates to a system for separating and reusing a perfluorocarbon compound, developed so as to effectively separate, discard or reuse a perfluorocarbon compound comprising sulfur hexafluoride, the perfluorocarbon compound being generated primarily during manufacturing of semiconductors. The system, for separating and reusing a perfluorocarbon compound, which handles gas comprising dust generated by discharge gas-emitting installations using or generating perfluorocarbons, such as a dry-etching process and a CVD cleansing chamber, comprises a first dry pump, a pre-processing filter, a membrane separation filter, a nitrogen reuse supply unit, a sulfur hexafluoride reuse supply unit, and a control unit, and thus facilitates separation and removal of a variety of gases and dust comprising perfluorocarbons generated by the electronics industry, and allows reuse of sulfur hexafluoride by separating same from the discharge gas and reprocessing same. |
