| 摘要 |
PURPOSE: An apparatus for manufacturing an organic EL device is provided to stably maintain a substrate by not forming an actuator in a vacuum process chamber. CONSTITUTION: A substrate holder(91) supports a substrate. The substrate holder is installed in a vacuum process chamber. A substrate reception pin is vertically installed in the vacuum process chamber. A substrate holder elevating device(68) raises the substrate holder. A clamp opening/closing pin(67) release the substrate from a substrate support device. |
