| 发明名称 | MEMS vibrator and oscillator | ||
| 摘要 | A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion. | ||
| 申请公布号 | US8760234(B2) | 申请公布日期 | 2014.06.24 |
| 申请号 | US201213550950 | 申请日期 | 2012.07.17 |
| 申请人 | Seiko Epson Corporation | 发明人 | Inaba Shogo |
| 分类号 | H03B5/30 | 主分类号 | H03B5/30 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. A micro electro mechanical system vibrator comprising: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in a thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in a plan view, the bending portion is in an arc shape in the plan view, and the one edge is supported by the supporting side face including the bending portion. | ||
| 地址 | JP | ||